Method and apparatus for micromachining using hard x-rays
A Standard patent application filed on 07 March 1996 credited to Siddons, David P
;
Klein, Jonathan L
;
Guckel, Henry
;
Johnson, Erik D
Details
Application number :
57107
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for micromachining using hard x-rays
Inventor :
Siddons, David P
;
Klein, Jonathan L
;
Guckel, Henry
;
Johnson, Erik D