Polishing compound for semiconductor containing peptide
A Standard patent application filed on 02 November 2000 credited to Sunahara, Kazuo
;
Shinmaru, Sachie
;
Tsugita, Katsuyuki
Details
Application number :
10545
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Polishing compound for semiconductor containing peptide