Interferometry system and method for calculating a phase change between successive interference patterns which are recorded in pairs by said interferometry system
A Standard patent application filed on 20 March 1996 credited to Van Haasteren, Adrianus Johannes Petrus
;
Laurijs, Michel Oscar Elisabeth
;
Bruinsma, Anastasius Jacobus Anicetus
Details
Application number :
48915
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Interferometry system and method for calculating a phase change between successive interference patterns which are recorded in pairs by said interferometry system
Inventor :
Van Haasteren, Adrianus Johannes Petrus
;
Laurijs, Michel Oscar Elisabeth
;
Bruinsma, Anastasius Jacobus Anicetus
Agent name :
Address for service :
Filing date :
20 March 1996
Associated companies :
Applicant name :
Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek TNO