Apparatus for depositing a layer of material on a substrate
A Standard patent application filed on 18 October 1995 credited to Ganapathi, Laxminarayana ; Rao, Rama ; Giles, Steven E

Details

Application number :

41948  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for depositing a layer of material on a substrate  

Inventor :

Ganapathi, Laxminarayana ; Rao, Rama ; Giles, Steven E  

Agent name :

 

Address for service :

 

Filing date :

18 October 1995  

Associated companies :

 

Applicant name :

EDSI, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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