Mechanically joined sputtering target and adapter therefor
A Standard patent application filed on 18 October 1995 credited to Strauss, David P
;
Gilman, Paul S.
;
Hunt, Thomas J
Details
Application number :
41291
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Mechanically joined sputtering target and adapter therefor
Inventor :
Strauss, David P
;
Gilman, Paul S.
;
Hunt, Thomas J