Method of depositing transition metal nitride thin films
A Standard patent application filed on 13 October 2000 credited to Elers, Kai-Erik ; Haukka, Suvi Paivikki ; Soininen, Pekka Juha ; Kaipio, Sari Johanna ; Saanila, Ville Antero

Details

Application number :

79268  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of depositing transition metal nitride thin films  

Inventor :

Elers, Kai-Erik ; Haukka, Suvi Paivikki ; Soininen, Pekka Juha ; Kaipio, Sari Johanna ; Saanila, Ville Antero  

Agent name :

 

Address for service :

 

Filing date :

13 October 2000  

Associated companies :

 

Applicant name :

Asm Microchemistry Oy  

Applicant address :

 

Old name :

 

Original Source :

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