Semiconductor processor with wafer face protection
A Standard patent application filed on 22 September 1995 credited to Bleck, Martin C. ; Reardon, Timothy J ; Bergman, Eric J

Details

Application number :

35953  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor processor with wafer face protection  

Inventor :

Bleck, Martin C. ; Reardon, Timothy J ; Bergman, Eric J  

Agent name :

 

Address for service :

 

Filing date :

22 September 1995  

Associated companies :

 

Applicant name :

Semitool, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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