Sputtering silicon dielectric films with noble gas mixtures
A Standard patent application filed on 21 July 1995 credited to Zarrabian, Sohrab ; Wolfe, Jesse D. ; Terry, Robert

Details

Application number :

27123  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Sputtering silicon dielectric films with noble gas mixtures  

Inventor :

Zarrabian, Sohrab ; Wolfe, Jesse D. ; Terry, Robert  

Agent name :

Davies Collison Cave  

Address for service :

Level 15 1 Nicholson Street MELBOURNE VIC 3000  

Filing date :

21 July 1995  

Associated companies :

 

Applicant name :

BOC Group, Inc., The  

Applicant address :

575 Mountain Avenue Murray Hill New Providence New Jersey 07974 United States Of America  

Old name :

 

Original Source :

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