Ionic lithography method, implementing equipment and reticle for such equipment
A Standard patent application filed on 11 October 2000 credited to Lazzari, Jean-Pierre ; Giardino, Gianni ; Borsoni, Gilles ; Le Roux, Vincent

Details

Application number :

77982  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Ionic lithography method, implementing equipment and reticle for such equipment  

Inventor :

Lazzari, Jean-Pierre ; Giardino, Gianni ; Borsoni, Gilles ; Le Roux, Vincent  

Agent name :

 

Address for service :

 

Filing date :

11 October 2000  

Associated companies :

 

Applicant name :

X-Ion  

Applicant address :

 

Old name :

 

Original Source :

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