Device for scanning the geometrical pattern of a mark of an object
A Standard patent application filed on 11 May 1995 credited to van Renesse, Rudolf Leopold
;
Snijders, Bart
;
Tel, Teunis
Details
Application number :
17990
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Device for scanning the geometrical pattern of a mark of an object
Inventor :
van Renesse, Rudolf Leopold
;
Snijders, Bart
;
Tel, Teunis