Method and apparatus for thin film coating an article
A Standard patent application filed on 24 October 1994 credited to Bjornard, Erik J.
;
Steffenhagen, Debra M
;
Kurman, Eric W
Details
Application number :
10846
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for thin film coating an article
Inventor :
Bjornard, Erik J.
;
Steffenhagen, Debra M
;
Kurman, Eric W