Sealed micromachined vacuum and gas filled devices
A Standard patent application filed on 26 October 1994 credited to Muller, Richard S ; Williams, Kirt R ; Mastrangelo, Carlos M

Details

Application number :

81251  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Sealed micromachined vacuum and gas filled devices  

Inventor :

Muller, Richard S ; Williams, Kirt R ; Mastrangelo, Carlos M  

Agent name :

 

Address for service :

 

Filing date :

26 October 1994  

Associated companies :

 

Applicant name :

Regents of the University of California, The  

Applicant address :

 

Old name :

 

Original Source :

Go