Semiconductor processing equipment having tiled ceramic liner
A Standard patent application filed on 11 September 2000 credited to Kennedy, William S. ; Hubacek, Jerome S. ; Maraschin, Robert A.

Details

Application number :

74779  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor processing equipment having tiled ceramic liner  

Inventor :

Kennedy, William S. ; Hubacek, Jerome S. ; Maraschin, Robert A.  

Agent name :

 

Address for service :

 

Filing date :

11 September 2000  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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