Ion beam vacuum sputtering apparatus and method
A Standard patent application filed on 18 September 2000 credited to Davis, Mervyn Howard
;
Pearson, David Ian Charles
;
Proudfoot, Gary
Details
Application number :
74338
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Ion beam vacuum sputtering apparatus and method
Inventor :
Davis, Mervyn Howard
;
Pearson, David Ian Charles
;
Proudfoot, Gary