Process and apparatus for forming zinc oxide film, and process and apparatus for producing photovoltaic device
A Standard patent application filed on 28 November 2000 credited to Sonoda, Yuichi
;
Miyamoto, Yusuke
;
Toyama, Noboru
;
Arao, Kozo
Details
Application number :
71861
Application type :
Standard
Application status :
SEALED
Under opposition :
No
Proceeding type :
Invention title :
Process and apparatus for forming zinc oxide film, and process and apparatus for producing photovoltaic device