Micromechanical filter and method for the manufacture thereof
A Standard patent application filed on 03 December 1992 credited to Branebjerg, Jens Anders
;
Jensen, Ole Sondergaard
;
Gravesen, Peter
Details
Application number :
32552
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micromechanical filter and method for the manufacture thereof
Inventor :
Branebjerg, Jens Anders
;
Jensen, Ole Sondergaard
;
Gravesen, Peter