Wafer processing cluster tool batch preheating and degassing method and apparatus
A Standard patent application filed on 21 January 1992 credited to Edwards, Richard C ; Ishikawa, Kiroichi ; Kolesa, Michael S

Details

Application number :

12700  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Wafer processing cluster tool batch preheating and degassing method and apparatus  

Inventor :

Edwards, Richard C ; Ishikawa, Kiroichi ; Kolesa, Michael S  

Agent name :

 

Address for service :

 

Filing date :

21 January 1992  

Associated companies :

 

Applicant name :

Materials Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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