Light source and wavelength stabilization control method, exposure apparatus andexposure method, method for producing exposure apparatus, and device manufactur ing method and device
A Standard patent application filed on 30 August 2000 credited to Ohtsuki, Tomoko ; Doi, Masaaki ; Atsumi, Niichi ; Owa, Soichi

Details

Application number :

68653  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Light source and wavelength stabilization control method, exposure apparatus andexposure method, method for producing exposure apparatus, and device manufactur ing method and device  

Inventor :

Ohtsuki, Tomoko ; Doi, Masaaki ; Atsumi, Niichi ; Owa, Soichi  

Agent name :

 

Address for service :

 

Filing date :

30 August 2000  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

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