Magnetron sputter coating method and apparatus with rotating magnet cathode
A Standard patent application filed on 16 October 1991 credited to Hurwitt, Steven D ; Wagner, Israel ; Hieronymi, Robert

Details

Application number :

89182  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Magnetron sputter coating method and apparatus with rotating magnet cathode  

Inventor :

Hurwitt, Steven D ; Wagner, Israel ; Hieronymi, Robert  

Agent name :

 

Address for service :

 

Filing date :

16 October 1991  

Associated companies :

 

Applicant name :

Materials Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go