Process for regenerating a cryopump and suitable cryopump for implementing this process
A Standard patent application filed on 10 September 1991 credited to Flick, Gerd ; Mundinger, Hans-Jurgen ; Hafner, Hans-Ulrich ; Klein, Hans-Hermann ; Forth, Hans-Joachim ; Timm, Uwe

Details

Application number :

84963  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Process for regenerating a cryopump and suitable cryopump for implementing this process  

Inventor :

Flick, Gerd ; Mundinger, Hans-Jurgen ; Hafner, Hans-Ulrich ; Klein, Hans-Hermann ; Forth, Hans-Joachim ; Timm, Uwe  

Agent name :

 

Address for service :

 

Filing date :

10 September 1991  

Associated companies :

 

Applicant name :

Leybold Aktiengesellschaft  

Applicant address :

 

Old name :

 

Original Source :

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