Device for evaporating material by means of a vacuum arc discharge and process
A Standard patent application filed on 01 August 1991 credited to Ehrich, Horst
;
Mausbach, Michael
;
Hasse, Brunhilde
Details
Application number :
82911
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Device for evaporating material by means of a vacuum arc discharge and process
Inventor :
Ehrich, Horst
;
Mausbach, Michael
;
Hasse, Brunhilde