Method for forming an insulating film on the surface of a solid body and an apparatus therefor
A Standard patent application filed on 20 May 1991 credited to Tsunoda, Tomoya
;
Kano, Ikushi
;
Fukuchi, Katuyoshi
Details
Application number :
77134
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Method for forming an insulating film on the surface of a solid body and an apparatus therefor