Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure
A Standard patent application filed on 27 July 2000 credited to Roth, John Reece
Details
Application number :
64953
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure