Apparatus for growing epitaxial layers on wafers
A Standard patent application filed on 24 July 2000 credited to Stall, Richard A. ; Beherrell, Scott ; Hou, Hong Q. ; Gurary, Alexander

Details

Application number :

64916  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for growing epitaxial layers on wafers  

Inventor :

Stall, Richard A. ; Beherrell, Scott ; Hou, Hong Q. ; Gurary, Alexander  

Agent name :

 

Address for service :

 

Filing date :

24 July 2000  

Associated companies :

 

Applicant name :

Emcore Corporation  

Applicant address :

 

Old name :

 

Original Source :

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