Optical device for illumination, exposure device, container of optical part, method of assembling exposure device, method of evaluating material, and method anddevice for evaluating filter
A Standard patent application filed on 04 August 2000 credited to Oshikawa, Satoru

Details

Application number :
64719  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Optical device for illumination, exposure device, container of optical part, method of assembling exposure device, method of evaluating material, and method anddevice for evaluating filter  
Inventor :
Oshikawa, Satoru  
Agent name :
 
Address for service :
 
Filing date :
04 August 2000  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor