Modular sputtering apparatus
A Standard patent application filed on 20 June 1989 credited to Lauro, Michael P. ; Beaulieu, Roland ; Case, Christopher ; Loferski, Joseph J. ; Chrissman, Everett E.

Details

Application number :

38512  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Modular sputtering apparatus  

Inventor :

Lauro, Michael P. ; Beaulieu, Roland ; Case, Christopher ; Loferski, Joseph J. ; Chrissman, Everett E.  

Agent name :

 

Address for service :

 

Filing date :

20 June 1989  

Associated companies :

 

Applicant name :

Brown University  

Applicant address :

 

Old name :

 

Original Source :

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