Method and apparatus for cold sputter cleaning an elongated metal substrate
A Standard patent application filed on 11 October 1988 credited to Chambaere, Daniel
;
Coppens, Wilfried
;
Lievens, Hugo
;
van Wassenhove, Norbert
;
Colpaert, Alex
;
Hoogewijs, Robert
;
Vennik, Joost
;
de Gryse, Roger
Details
Application number :
23628
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for cold sputter cleaning an elongated metal substrate
Inventor :
Chambaere, Daniel
;
Coppens, Wilfried
;
Lievens, Hugo
;
van Wassenhove, Norbert
;
Colpaert, Alex
;
Hoogewijs, Robert
;
Vennik, Joost
;
de Gryse, Roger