A fabrication method for forming a self-aligned contact window and connection in an epitaxial layer and device structures employing the method
A Standard patent application filed on 01 October 1987 credited to Machesney, Brain John
;
Lu, Nicky Chau-Chun
Details
Application number :
79268
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
A fabrication method for forming a self-aligned contact window and connection in an epitaxial layer and device structures employing the method