A plasma etching method and device
A Standard patent application filed on 15 October 1986 credited to Boswell, Roderick ; Henry, Daniel

Details

Application number :

63923  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

A plasma etching method and device  

Inventor :

Boswell, Roderick ; Henry, Daniel  

Agent name :

SPRUSON & FERGUSON  

Address for service :

GPO Box 3898 SYDNEY NSW 2001  

Filing date :

15 October 1986  

Associated companies :

 

Applicant name :

French State, The  

Applicant address :

38-40 Rue du General Leclerc, 92131 Issy Les Moulineaux, France.  

Old name :

 

Original Source :

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