Robot pre-positioning in a wafer processing system
A Standard patent application filed on 23 June 2000 credited to Babikian, Dikran S. ; Oh, Hilario

Details

Application number :

56366  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Robot pre-positioning in a wafer processing system  

Inventor :

Babikian, Dikran S. ; Oh, Hilario  

Agent name :

 

Address for service :

 

Filing date :

23 June 2000  

Associated companies :

 

Applicant name :

Silicon Valley Group, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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