SUBMICRON MASK OPENINGS USING SIDEWALL AND LIFT-OFF TECHNIQUES
A Standard patent application filed on 13 June 1986 credited to Shepard, Joseph Francis ; Cook, Robert Kimbal

Details

Application number :

58846  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

SUBMICRON MASK OPENINGS USING SIDEWALL AND LIFT-OFF TECHNIQUES  

Inventor :

Shepard, Joseph Francis ; Cook, Robert Kimbal  

Agent name :

SPRUSON & FERGUSON  

Address for service :

GPO Box 3898 SYDNEY NSW 2001  

Filing date :

13 June 1986  

Associated companies :

 

Applicant name :

International Business Machines Corporation  

Applicant address :

Armonk, New York 10504, U.S.A.  

Old name :

 

Original Source :

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