Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same
A Standard patent application filed on 12 June 2000 credited to Ladabaum, Igal
Details
Application number :
56071
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same