Coatings on reflective mask substrates
A Standard patent application filed on 06 June 2000 credited to Tong, William Man-Wai ; Taylor, John ; Hector, Scott D. ; Thompson, Matthew A. ; Stivers, Alan R. ; Kofron, Patrick G. ; Mangat, Pawitter J. S.

Details

Application number :

55970  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Coatings on reflective mask substrates  

Inventor :

Tong, William Man-Wai ; Taylor, John ; Hector, Scott D. ; Thompson, Matthew A. ; Stivers, Alan R. ; Kofron, Patrick G. ; Mangat, Pawitter J. S.  

Agent name :

 

Address for service :

 

Filing date :

06 June 2000  

Associated companies :

 

Applicant name :

Regents of the University of California, The  

Applicant address :

 

Old name :

 

Original Source :

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