Optical view port for chemical mechanical planarization endpoint detection
A Standard patent application filed on 10 June 2000 credited to Treur, Randolph E. ; Wolf, Stephan H. ; Boyd, John M.

Details

Application number :

54807  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical view port for chemical mechanical planarization endpoint detection  

Inventor :

Treur, Randolph E. ; Wolf, Stephan H. ; Boyd, John M.  

Agent name :

 

Address for service :

 

Filing date :

10 June 2000  

Associated companies :

 

Applicant name :

Strasbaugh, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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