MULTIPLE CHAMBER DEPOSITION AND ISOLATION SYSTEM AND METHOD
A Standard patent application filed on 08 September 1982 credited to Cannella, Vincent David ; Hudgens, Stephen Jenkins ; Izu, Masatsugu

Details

Application number :

88136  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

MULTIPLE CHAMBER DEPOSITION AND ISOLATION SYSTEM AND METHOD  

Inventor :

Cannella, Vincent David ; Hudgens, Stephen Jenkins ; Izu, Masatsugu  

Agent name :

Griffith Hack  

Address for service :

GPO Box 4164 SYDNEY NSW 2001  

Filing date :

08 September 1982  

Associated companies :

 

Applicant name :

Energy Conversion Devices Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go  

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