Methods for cleaning microelectronic substrates using ultradilute cleaning liquids
A Standard patent application filed on 12 May 2000 credited to Puri, Suraj ; Mohindra, Raj ; Medeiros, Joseph

Details

Application number :
48465  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Methods for cleaning microelectronic substrates using ultradilute cleaning liquids  
Inventor :
Puri, Suraj ; Mohindra, Raj ; Medeiros, Joseph  
Agent name :
 
Address for service :
 
Filing date :
12 May 2000  
Associated companies :
 
Applicant name :
FSI International, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor