Electrostatic chuck and treating device
A Standard patent application filed on 25 May 2000 credited to Kitabayashi, Tetsuo ; Hori, Hiroaki ; Maehira, Ken ; Tateno, Noriaki ; Fuwa, Koh ; Uchimura, Takeshi

Details

Application number :

47813  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Electrostatic chuck and treating device  

Inventor :

Kitabayashi, Tetsuo ; Hori, Hiroaki ; Maehira, Ken ; Tateno, Noriaki ; Fuwa, Koh ; Uchimura, Takeshi  

Agent name :

 

Address for service :

 

Filing date :

25 May 2000  

Associated companies :

 

Applicant name :

Toto Ltd.  

Applicant address :

 

Old name :

 

Original Source :

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