Microfabricated template for multiple charged particle beam calibrations and shielded charged particle beam lithography
A Standard patent application filed on 03 May 2000 credited to Lee, Kim Y. ; Kim, Ho-Seob ; Chang, T. H. P. ; Muray, Lawrence ; Mankos, Marian

Details

Application number :

47153  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Microfabricated template for multiple charged particle beam calibrations and shielded charged particle beam lithography  

Inventor :

Lee, Kim Y. ; Kim, Ho-Seob ; Chang, T. H. P. ; Muray, Lawrence ; Mankos, Marian  

Agent name :

 

Address for service :

 

Filing date :

03 May 2000  

Associated companies :

 

Applicant name :

ETEC Systems, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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