Plasma processing centrifuge with dual zone temperature control
A Standard patent application filed on 09 May 2000 credited to Sharma, Rajesh
;
Paul, Hanns-Ingolf
;
Freyer, Detlef R. W.
;
Cooper, Timothy A.
Details
Application number :
47092
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Plasma processing centrifuge with dual zone temperature control
Inventor :
Sharma, Rajesh
;
Paul, Hanns-Ingolf
;
Freyer, Detlef R. W.
;
Cooper, Timothy A.