Gas discharge laser with gas temperature control
A Standard patent application filed on 02 May 2000 credited to Ujazdowski, Richard C. ; Morton, Richard G. ; Berger, Dmitri ; Partlo, William N ; Watson, Tom A ; Azzola, James H. ; Oliver, I. Roger ; Duffey, Thomas P. ; Fomenkov, Igor V ; Thompson, Paul S. ; Tedesco, Carl E. II

Details

Application number :

46968  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas discharge laser with gas temperature control  

Inventor :

Ujazdowski, Richard C. ; Morton, Richard G. ; Berger, Dmitri ; Partlo, William N ; Watson, Tom A ; Azzola, James H. ; Oliver, I. Roger ; Duffey, Thomas P. ; Fomenkov, Igor V ; Thompson, Paul S. ; Tedesco, Carl E. II  

Agent name :

 

Address for service :

 

Filing date :

02 May 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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