Method and system for cleaning a chemical mechanical polishing pad

Application number :: 46918
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and system for cleaning a chemical mechanical polishing pad
Inventor :: Mikhaylich, Katrina A. ; Svirchevski, Julia S.
Agent name :
Address for service :
Filing date :: 02 May 2000
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Method and system for cleaning a chemical mechanical polishing pad A Standard patent application filed on 02 May 2000 credited to Mikhaylich, Katrina A. ; Svirchevski, Julia S.