Tangential fan with cutoff assembly and vibration control for electric discharge laser
A Standard patent application filed on 25 April 2000 credited to Hofmann, Thomas ; Howey, James K. ; Webb, Kyle R. ; Ujazdowski, Richard C. ; Watson, Tom A ; Shannon, Robert A.

Details

Application number :

46693  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Tangential fan with cutoff assembly and vibration control for electric discharge laser  

Inventor :

Hofmann, Thomas ; Howey, James K. ; Webb, Kyle R. ; Ujazdowski, Richard C. ; Watson, Tom A ; Shannon, Robert A.  

Agent name :

 

Address for service :

 

Filing date :

25 April 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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