Universal tool interface and/or workpiece transfer apparatus for smif and open pod applications
A Standard patent application filed on 25 April 2000 credited to Bonora, Anthony C. ; Netsch, Robert R. ; Dipaola, J. Mark ; Cortez, Edward J.

Details

Application number :

46610  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Universal tool interface and/or workpiece transfer apparatus for smif and open pod applications  

Inventor :

Bonora, Anthony C. ; Netsch, Robert R. ; Dipaola, J. Mark ; Cortez, Edward J.  

Agent name :

 

Address for service :

 

Filing date :

25 April 2000  

Associated companies :

 

Applicant name :

Asyst Technologies, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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