Method for transferring wafers and ring
A Standard patent application filed on 08 May 2000 credited to Kuznetsov, Vladimir Ivanovich ; Granneman, Ernst Hendrik August ; Ridder, Christianus Gerardus Maria ; Oosterlaken, Theodorus Gerardus Maria

Details

Application number :

46260  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for transferring wafers and ring  

Inventor :

Kuznetsov, Vladimir Ivanovich ; Granneman, Ernst Hendrik August ; Ridder, Christianus Gerardus Maria ; Oosterlaken, Theodorus Gerardus Maria  

Agent name :

 

Address for service :

 

Filing date :

08 May 2000  

Associated companies :

 

Applicant name :

ASM International N.V.  

Applicant address :

 

Old name :

 

Original Source :

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