CONTINUOUS DEPOSITION OF A LAYER OF SEMICONDUCTOR MATERIAL ON A HEATED SUBSTRATE
A Standard patent application filed on 01 February 1980 credited to Baumberger, Otto
;
Kalbskopf, Reinhard
Details
Application number :
55139
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
CONTINUOUS DEPOSITION OF A LAYER OF SEMICONDUCTOR MATERIAL ON A HEATED SUBSTRATE