Method of manufacturing polycrystalline silicon rod
A Standard patent application filed on 23 March 2009 credited to Oguro, Kyoji
;
Kurotani, Shinichi
;
Netsu, Shigeyoshi
;
Mizuno, Michihiro
Details
Application number :
2009201143
Application type :
Standard
Application status :
FILED
Under opposition :
No
Proceeding type :
Invention title :
Method of manufacturing polycrystalline silicon rod