Method and getter devices for use in deposition of thin layers
A Standard patent application filed on 11 April 2000 credited to Conte, Andrea
;
Moraja, Marco
;
Mazza, Francesco
Details
Application number :
43122
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and getter devices for use in deposition of thin layers