Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon

Application number :: 2006340825
Application type :: Standard
Application status :: FILED
Under opposition :: No
Proceeding type :
Invention title :: Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon
Inventor :: King, Mackenzie ; Jiang, Ping ; Visintin, Pamela M. ; Korzenski, Michael B.
Agent name :: Callinans
Address for service :: 1193 Toorak Road Camberwell VIC 3124 Australia
Filing date :: 09 November 2006
Associated companies :
Applicant name :: Advanced Technology Materials, Inc.
Applicant address :: 7 Commerce Drive Danbury CT 06810 United States of America
Old name :
Original Source :: Go

Composition and method for recycling semiconductor wafers having low-k dielectric materials thereon A Standard patent application filed on 09 November 2006 credited to King, Mackenzie ; Jiang, Ping ; Visintin, Pamela M. ; Korzenski, Michael B.