Plasma nozzle array for providing uniform scalable microwave plasma generation
A Standard patent application filed on 21 July 2005 credited to Lee, Sang Hun
;
Kim, Jay Joongsoo
Details
Application number :
2005269581
Application type :
Standard
Application status :
SEALED
Under opposition :
No
Proceeding type :
Invention title :
Plasma nozzle array for providing uniform scalable microwave plasma generation
Inventor :
Lee, Sang Hun
;
Kim, Jay Joongsoo
Agent name :
Pizzeys Patent and Trade Mark Attorneys
Address for service :
Level 20 324 Queen Street Brisbane QLD 4000 Australia
Filing date :
21 July 2005
Associated companies :
Applicant name :
Amarante Technologies, Inc.
Applicant address :
3350 Scott Blvd. Building 16 Santa Clara California 95054 United States of America