System and method for controlling process temperatures for semi-conductor wafer
A Standard patent application filed on 10 March 2000 credited to Alcoz, Jorge J. ; Duffer, Charles E.

Details

Application number :

38729  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method for controlling process temperatures for semi-conductor wafer  

Inventor :

Alcoz, Jorge J. ; Duffer, Charles E.  

Agent name :

 

Address for service :

 

Filing date :

10 March 2000  

Associated companies :

 

Applicant name :

Karta Technologies, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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